JPH028253B2 - - Google Patents

Info

Publication number
JPH028253B2
JPH028253B2 JP57152610A JP15261082A JPH028253B2 JP H028253 B2 JPH028253 B2 JP H028253B2 JP 57152610 A JP57152610 A JP 57152610A JP 15261082 A JP15261082 A JP 15261082A JP H028253 B2 JPH028253 B2 JP H028253B2
Authority
JP
Japan
Prior art keywords
strain
thin
diaphragm
pressure
strain beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57152610A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5943326A (ja
Inventor
Michitaka Shimazoe
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15261082A priority Critical patent/JPS5943326A/ja
Publication of JPS5943326A publication Critical patent/JPS5943326A/ja
Publication of JPH028253B2 publication Critical patent/JPH028253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP15261082A 1982-09-03 1982-09-03 半導体圧力検出器 Granted JPS5943326A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15261082A JPS5943326A (ja) 1982-09-03 1982-09-03 半導体圧力検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15261082A JPS5943326A (ja) 1982-09-03 1982-09-03 半導体圧力検出器

Publications (2)

Publication Number Publication Date
JPS5943326A JPS5943326A (ja) 1984-03-10
JPH028253B2 true JPH028253B2 (en]) 1990-02-23

Family

ID=15544157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15261082A Granted JPS5943326A (ja) 1982-09-03 1982-09-03 半導体圧力検出器

Country Status (1)

Country Link
JP (1) JPS5943326A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0742822Y2 (ja) * 1987-07-20 1995-10-04 サンデン株式会社 自動車用空調装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1078217A (en) * 1976-03-31 1980-05-27 Robert C. Whitehead (Jr.) Force transducing cantilever beam and pressure transducer incorporating it
US4327350A (en) * 1979-07-17 1982-04-27 Data Instruments, Inc. Pressure transducer

Also Published As

Publication number Publication date
JPS5943326A (ja) 1984-03-10

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